Invention Grant
- Patent Title: Dynamic pressure sensor
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Application No.: US15350787Application Date: 2016-11-14
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Publication No.: US10393606B2Publication Date: 2019-08-27
- Inventor: Andreas Wiesbauer , Alfons Dehe
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B3/00 ; H04R1/08 ; G01L9/08

Abstract:
According to various embodiments, a dynamic pressure sensor includes a substrate, a reference volume formed in the substrate, a deflectable membrane sealing the reference volume, a deflection sensing element coupled to the membrane and configured to measure a deflection of the membrane, and a ventilation hole configured to equalize an absolute pressure inside the reference volume with an absolute ambient pressure outside the reference volume.
Public/Granted literature
- US20170052083A1 Dynamic Pressure Sensor Public/Granted day:2017-02-23
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