Invention Grant
- Patent Title: Controlled pulse generation methods and apparatuses for evaluating stiction in microelectromechanical systems devices
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Application No.: US15189892Application Date: 2016-06-22
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Publication No.: US10393618B2Publication Date: 2019-08-27
- Inventor: Peter T. Jones , Arvind Salian , William D. McWhorter , Chad Krueger , John Shipman , Michael Naumann , Larry D. Metzler , Tripti Regmi
- Applicant: FREESCALE SEMICONDUCTOR INC.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Agent Charlene R. Jacobsen
- Main IPC: G01M7/08
- IPC: G01M7/08 ; B81C99/00

Abstract:
Methods and apparatuses are provided for evaluating or testing stiction in Microelectromechanical Systems (MEMS) devices utilizing a mechanized shock pulse generation approach. In one embodiment, the method includes the step or process of loading a MEMS device, such as a multi-axis MEMS accelerometer, into a socket provided on a Device-Under-Test (DUT) board. After loading the MEMS device into the socket, a series of controlled shock pulses is generated and transmitted through the MEMS device utilizing a mechanized test apparatus. The mechanized test apparatus may, for example, repeatedly move the DUT board over a predefined motion path to generate the controlled shock pulses. In certain cases, transverse vibrations may also be directed through the tested MEMS device in conjunction with the shock pulses. An output of the MEMS device is then monitored to determine whether stiction of the MEMS device occurs during each of the series of controlled shock pulses.
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