- Patent Title: Method and structure for incorporating strain in nanosheet devices
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Application No.: US15888794Application Date: 2018-02-05
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Publication No.: US10396202B2Publication Date: 2019-08-27
- Inventor: Karthik Balakrishnan , Kangguo Cheng , Pouya Hashemi , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L29/04 ; H01L29/06 ; H01L29/165 ; H01L29/423 ; H01L29/778 ; H01L29/786 ; H01L29/08

Abstract:
A semiconductor structure includes a plurality of stacked and suspended semiconductor nanosheets located above a semiconductor substrate. Each semiconductor nanosheet has a pair of end sidewalls that have a V-shaped undercut surface. A functional gate structure is located around the plurality of stacked and suspended semiconductor nanosheets, and a source/drain (S/D) semiconductor material structure is located on each side of the functional gate structure. In accordance with the present application, sidewall portions of each S/D semiconductor material structure are in direct contact with the V-shaped undercut surface of the end sidewalls of each of the semiconductor nanosheets.
Public/Granted literature
- US20180158952A1 METHOD AND STRUCTURE FOR INCORPORATING STRAIN IN NANOSHEET DEVICES Public/Granted day:2018-06-07
Information query
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