Invention Grant
- Patent Title: Field-effect transistors with fins formed by a damascene-like process
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Application No.: US15712748Application Date: 2017-09-22
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Publication No.: US10403742B2Publication Date: 2019-09-03
- Inventor: Wei Zhao , Haiting Wang , David P. Brunco , Jiehui Shu , Shesh Mani Pandey , Jinping Liu , Scott Beasor
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/02 ; H01L21/762 ; H01L29/417 ; H01L21/8234 ; H01L21/8238 ; H01L27/088 ; H01L27/092 ; H01L29/10 ; H01L21/84 ; H01L27/12

Abstract:
Methods of forming a structure for a fin-type field-effect transistor and structures for a fin-type field-effect transistor. An etch stop layer, a sacrificial layer, and a dielectric layer are arranged in a layer stack formed on a substrate. a plurality of openings are formed that extend through the layer stack to the substrate. A semiconductor material is epitaxially grown inside each of the plurality of openings from the substrate to form a plurality of fins embedded in the layer stack. The sacrificial layer is removed selective to the etch stop layer to reveal a section of each of the plurality of fins.
Public/Granted literature
- US20190097019A1 FIELD-EFFECT TRANSISTORS WITH FINS FORMED BY A DAMASCENE-LIKE PROCESS Public/Granted day:2019-03-28
Information query
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