Invention Grant
- Patent Title: Resonating measurement system using improved resolution
-
Application No.: US15499292Application Date: 2017-04-27
-
Publication No.: US10416003B2Publication Date: 2019-09-17
- Inventor: Luca Leoncino , Sebastien Hentz , Guillaume Jourdan , Marc Sansa Perna
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1653901 20160429
- Main IPC: G01D5/353
- IPC: G01D5/353 ; G01L9/00 ; G01P15/093 ; G01P15/097 ; G01D5/26 ; G01D5/34 ; G01M11/00 ; G01N29/036 ; G01N29/24 ; G01L1/10

Abstract:
A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f1=fm+Δf, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of Δf.
Public/Granted literature
- US20170314973A1 RESONATING MEASUREMENT SYSTEM USING IMPROVED RESOLUTION Public/Granted day:2017-11-02
Information query
IPC分类: