Invention Grant
- Patent Title: Test device and method for testing a mirror
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Application No.: US15676729Application Date: 2017-08-14
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Publication No.: US10422718B2Publication Date: 2019-09-24
- Inventor: Hans-Michael Stiepan , Jochen Hetzler , Sebastian Fuchs
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102015202695 20150213
- Main IPC: G01M11/00
- IPC: G01M11/00 ; G01M11/02 ; G03F7/20 ; G01B9/02 ; G01B9/021

Abstract:
A test appliance and a method for testing a mirror, e.g., a mirror of a microlithographic projection exposure apparatus. The test appliance has a computer-generated hologram (CGH), and a test can be carried out on at least a portion of the mirror by way of an interferometric superposition of a test wave that is directed onto the mirror by this computer-generated hologram and a reference wave. Here, the computer-generated hologram (CGH) (120, 320) is designed in such a way that, during operation of the appliance, it provides a first test wave for testing a first portion of the mirror (101, 301) by interferometric superposition with a reference wave in a first position of the mirror (101, 301) and at least a second test wave for testing a second portion of the mirror (101, 301) by interferometric superposition with a reference wave in a second position of the mirror (101, 301).
Public/Granted literature
- US20170343449A1 TEST DEVICE AND METHOD FOR TESTING A MIRROR Public/Granted day:2017-11-30
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