- Patent Title: Organic light-emitting display apparatus, organic layer deposition apparatus, and method of manufacturing the organic light-emitting display apparatus by using the organic layer deposition apparatus
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Application No.: US15059323Application Date: 2016-03-03
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Publication No.: US10424735B2Publication Date: 2019-09-24
- Inventor: Suhwan Lee , Muhyun Kim , Dongkyu Lee , Eunho Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-Si, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-Si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2015-0110235 20150804
- Main IPC: H01L51/00
- IPC: H01L51/00 ; C23C14/04 ; H01L21/67 ; C23C14/56 ; H01L21/677 ; H01L27/32 ; H01L51/56

Abstract:
An organic layer deposition apparatus, including a deposition unit including at least one deposition assembly spaced apart from a substrate, the at least one deposition assembly depositing a material on the substrate, the at least one deposition assembly including a deposition source that discharges a deposition material; a deposition source nozzle unit mounted on the deposition source, the deposition source nozzle unit having a deposition source nozzle formed therein; and a plurality of pattern sheets facing the deposition source nozzle unit and spaced apart from one another so that the deposition material is deposited on a plurality of different regions of the substrate via the plurality of pattern sheets.
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