Invention Grant
- Patent Title: Light measurement device
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Application No.: US15559872Application Date: 2016-03-17
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Publication No.: US10429244B2Publication Date: 2019-10-01
- Inventor: Takeshi Akagawa , Masahiro Kubo , Katsumi Abe , Kimiyasu Takoh , Ersin Altintas , Yuji Ohno , Tetsuri Ariyama
- Applicant: NEC Corporation
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Agency: Wilmer Cutler Pickering Hale and Dorr LLP
- Priority: JP2015-062054 20150325
- International Application: PCT/JP2016/001540 WO 20160317
- International Announcement: WO2016/152108 WO 20160929
- Main IPC: G01J9/02
- IPC: G01J9/02 ; G01B9/02 ; G01N21/41 ; G01N21/45

Abstract:
[Object]To obtain interference light having a stronger light intensity, and to more accurately measure a refractive index of a measured object, with a simplified configuration.[Solution Means]A light measurement device 100 includes a phase adjustment unit 120 and a detector 140. The phase adjustment unit 120 outputs reference light E(R) based on object light E1 being light to be obtained by transmission or reflection of light E from a light source with respect to a measured object 200, and signal light E(S) whose phase is adjusted to be different from a phase of signal light. The detector 140 derives a transmission or reflection light intensity distribution or a refractive index of the measured object 200, based on interference light E2 between signal light E(S) and reference light E(R) to be output by the phase adjustment unit 120. An optical axis of light E from a light source is linearly disposed. The phase adjustment unit 120 and the detector 140 are disposed on the optical axis of light E from a light source.
Public/Granted literature
- US20180058938A1 LIGHT MEASUREMENT DEVICE Public/Granted day:2018-03-01
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