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公开(公告)号：US11573527B2
公开(公告)日：2023-02-07
申请号：US16442181
申请日：2019-06-14
发明人： Akihito Kagotani
IPC分类号： G03H1/08 , B42D25/328 , G01J9/02 , G03H1/00 , G03H1/02
摘要： A phase modulation structure includes a recording surface including phase angle recording regions in a plurality of calculated element regions corresponding to reconstruction points of an image on a one-to-one basis, each phase angle recording region being formed of a plurality of unit blocks in each of which a phase angle is recorded, the phase angle being calculated based on a phase that is a sum of a plurality of phases of light from the corresponding reconstruction points; and a representative area that is one of divisions of the calculated element region, the representative area being obtained by radially dividing the calculated element region centered on a point on the calculated element region, the point being obtained by extending a normal line from the corresponding reconstruction point to the calculated element region on the recording surface.
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公开(公告)号：US11522334B2
公开(公告)日：2022-12-06
申请号：US16885129
申请日：2020-05-27
发明人： Shaobo Fang , Zhiyi Wei , Pei Huang , Yitan Gao , Kun Zhao
IPC分类号： G01J11/00 , G02F1/35 , G01J9/02 , G02B27/10 , G02B27/14 , H01S3/13 , H01S3/123 , H01S3/10 , H01S3/00 , G02B26/06
摘要： Methods and devices are described for performing an all-phase measurement of an ultra-fast laser pulse having a spectral range of greater than one octave. The ultra-fast laser pulse may be split into a first beam comprising a fundamental light with a wavelength λ0 and a second beam comprising a light with a wavelength 2λ0. The light with the wavelength 2λ0 may be frequency doubled to a light with a wavelength λ0 to generate an interference with the fundamental light. Fourier transform may be performed on an interference spectrum of the interference, and a relative envelope delay (RED) between the fundamental light and the frequency doubled light and a carrier envelope phase (CEP) may be acquired based on a result of the Fourier transform.
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公开(公告)号：US20220326086A1
公开(公告)日：2022-10-13
申请号：US17701847
申请日：2022-03-23
发明人： Scott Bloom
摘要： An interferometer for use in remote sensing systems includes a beam splitter that separates an input wave into a reflected wave, which travels along a first optical path within an upper interferometer arm, and a transmitted wave, which travels along a second optical path within a lower interferometer arm. The reflected and transmitted waves are subsequently recombined by the beam splitter for imaging onto a sensor. A highly dispersive element is incorporated into at least one of the pair of interferometer arms. Due to anomalous dispersion, a frequency shift in a wave transmitted through a dispersive element changes the optical path length within its corresponding arm. As a result, the recombined wave produces an interference pattern with a measurable phase change that can be utilized to calculate the original frequency shift in the input wave with great precision and potential sub-Hertz sensitivity.
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公开(公告)号：US11460346B2
公开(公告)日：2022-10-04
申请号：US17410012
申请日：2021-08-24
申请人： Anhui University
发明人： Xuqiang Wu , Benli Yu , Jinhui Shi , Shenglai Zhen , Dong Guang
摘要： The present disclosure provides a phase sensitivity calibration method based on a phase generated carrier (PGC) technology, which is characterized in that in the operation process of a PGC algorithm, an additional calibration signal with a phase of known magnitude is applied through a phase modulator. This signal is demodulated through an arctangent algorithm or a differential cross multiplication algorithm, and a demodulated output value corresponding to a unit phase in the algorithm is obtained. The phase of known magnitude can be obtained by converting a carrier modulation depth parameter according to a certain ratio.
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公开(公告)号：US20220291598A1
公开(公告)日：2022-09-15
申请号：US17770575
申请日：2020-09-28
申请人： ASML Holding N.V.
摘要： An apparatus for and method of sensing alignment marks in which a self-referencing interferometer based sensor outputs standing images of the alignment marks and camera device is used to capture the images as output by the sensor and a detector is used to obtain phase information about the alignment marks from the images as output by the sensor.
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公开(公告)号：US20220187138A1
公开(公告)日：2022-06-16
申请号：US17553144
申请日：2021-12-16
发明人： Okan Ersoy
摘要： A totagram is produced by an iterative spectral phase recovery process resulting in complete information recovery using special masks, without a reference beam. Using these special masking systems reduce computation time, number of masks, and number of iterations. The special masking system is (1) a unity mask together with one or more bipolar binary masks with elements equal to 1 and −1, or (2) a unity mask together with one or more phase masks, or (3) a unity mask together with one pair of masks or more than one pair of masks having binary amplitudes of 0's and 1's, in which the masks in the pair are complementary to each other with respect to amplitude, or (4) one or more pairs of complementary masks with binary amplitudes of 0's and 1's without a unity mask.
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公开(公告)号：US11300892B2
公开(公告)日：2022-04-12
申请号：US17256408
申请日：2019-06-13
摘要： A sensor apparatus (300) for determining a position of a target (330) of a substrate (W) comprising, projection optics (315;321) configured to project a radiation beam (310) onto the substrate, collection optics (321) configured to collect measurement radiation (325) that has scattered from the target, a wavefront sensing system (335) configured to determine a pupil function variation of at least a portion (355) of the measurement radiation and output a signal (340) indicative thereof, and a measurement system (350) configured to receive the signal and to determine the position of the target in at least partial dependence on the collected measurement radiation and the determined pupil function variation of at least a portion of the measurement radiation.
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公开(公告)号：US11300455B2
公开(公告)日：2022-04-12
申请号：US16982678
申请日：2019-03-26
发明人： Shingo Ono , Kunihiro Toge , Tetsuya Manabe
摘要： Provided is an optical spectrum line width calculation method, apparatus, and program capable of calculating a spectrum line width of a laser to be measured from an optical interference signal generated by an optical interferometer having a delay line, based on a phase of the optical interference signal having a delay time longer than a delay time due to the delay line. The optical spectrum line width measurement apparatus includes a Mach-Zehnder interferometer, an optical receiver that receives an optical interference signal emitted from the Mach-Zehnder interferometer, an A/D converter that converts an analog electric signal output from the optical receiver into a digital electric signal, and a processing apparatus that processes the digital electric signal. Two light beams having a delay difference τ are generated from light emitted from the laser to be measured, and an optical interference signal is generated by multiplexing the two light beams.
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公开(公告)号：US11283237B2
公开(公告)日：2022-03-22
申请号：US16518689
申请日：2019-07-22
申请人： Coherent, Inc.
发明人： Qize Shu
IPC分类号： H01S5/0683 , G01J9/02
摘要： A wavelength sensor for wavelength stabilization of a laser beam includes an etalon placed in the laser beam and tilted with respect to the laser beam. Reflected beams from the etalon form an interference pattern on a segmented photodetector having two detector segments. Output signals from the two detector segments are used to derive an error signal for a closed control loop to effect the wavelength stabilization.
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公开(公告)号：US20210325254A1
公开(公告)日：2021-10-21
申请号：US17224466
申请日：2021-04-07
发明人： Niels Verellen , Dmitry Kouznetsov , Pol Van Dorpe
摘要： Example embodiments relate to methods and devices for generating (quasi-) periodic interference patterns. One embodiment includes a method for generating an interference pattern using multi-beam interference of electromagnetic radiation. The method includes computing a set of grid points in a complex plane representing a grid with a desired symmetry. The method also includes selecting a radius of a virtual circle. Additionally, the method includes selecting a set of grid points in the complex plane that lies on the virtual circle centered around a virtual center point. Further, the method includes associating an argument of each grid point of the selected set of grid points in the complex plane with a propagation direction of plane waves or quasi plane waves or parallel wave fronts. In addition, the method includes obtaining the interference pattern that is a superposition of the plane waves or quasi plane waves or parallel wave fronts.
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