Invention Grant
- Patent Title: Imprint apparatus and method
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Application No.: US15869189Application Date: 2018-01-12
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Publication No.: US10431456B2Publication Date: 2019-10-01
- Inventor: Futoshi Yoshida
- Applicant: Samsung Display Co. Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Priority: KR10-2017-0097298 20170731
- Main IPC: H01L21/027
- IPC: H01L21/027 ; B41K3/42 ; G02F1/1335 ; G02F1/1362

Abstract:
An imprint method includes: applying a applying a material for forming a patterned layer having a pattern, to a substrate; feeding a stamp film including a stamp pattern corresponding to the pattern of the patterned layer, along a pressure roller and an idle roller; forming the patterned layer having the pattern, including: the pressure roller pressing the stamp film toward the material to contact the stamp pattern of the stamp film with the material layer, curing the material layer in contact with the stamp pattern, and moving the pressure roller and the idle roller to peel the stamp film off the cured material layer by a peeling force, to form the patterned layer having the pattern; and detecting a defect in the formed patterned layer, during the peeling of the stamp film, by sensing the peeling force in real time by a pressure sensor connected to the pressure roller.
Public/Granted literature
- US20190035620A1 IMPRINT APPARATUS AND METHOD Public/Granted day:2019-01-31
Information query
IPC分类: