Invention Grant
- Patent Title: Deposition apparatus
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Application No.: US15950344Application Date: 2018-04-11
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Publication No.: US10431461B2Publication Date: 2019-10-01
- Inventor: Jaebum Pahk
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2015-0051136 20150410
- Main IPC: H01L21/22
- IPC: H01L21/22 ; C23C14/22 ; C23C14/24

Abstract:
A deposition apparatus including a crucible to receive the deposition material and in which a deposition material is evaporated; a linear deposition source having a sprayer to spray the evaporated deposition material; a first connection portion and a second connection portion spaced apart from each other by a predetermined interval, the first connection portion and the second connection portion connecting the linear deposition source to the crucible at an upper surface of the crucible; and a heater in the crucible to apply heat to the deposition material, wherein the upper surface of the crucible has a first convex portion and a second convex portion successively formed between the first connection portion and the second connection portion.
Public/Granted literature
- US20180233364A1 DEPOSITION APPARATUS Public/Granted day:2018-08-16
Information query
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