- 专利标题: Confocal microscope for determination of a layer thickness and microscopy method for determination of a layer thickness
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申请号: US16042383申请日: 2018-07-23
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公开(公告)号: US10436571B2公开(公告)日: 2019-10-08
- 发明人: Matthias Vaupel , Nils Langholz
- 申请人: Carl Zeiss Microscopy GmbH
- 申请人地址: DE Jena
- 专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人地址: DE Jena
- 代理机构: LaBatt, LLC
- 优先权: DE102017116745 20170725
- 主分类号: G01B11/06
- IPC分类号: G01B11/06 ; G01B9/02 ; G02B21/00
摘要:
A confocal microscope for determination of a layer thickness comprises: a focus adjusting device configured to adjust a relative displacement between a focus position of the illumination light and a specimen position along an optical axis, wherein measurement signals belonging to different settings of the focus adjusting device can be recorded; an evaluation device for determining a specimen layer thickness as follows: determine intensity band positions of two intensity bands in a measurement graph recorded by a light measuring device, the measurement graph indicating a light intensity in dependence of the focus position; determine a layer thickness on the basis of a positional difference between the intensity band positions; and determine the layer thickness using a mathematical model which describes for overlapping intensity bands a dependence of the intensity band positions on a light wavelength and the layer thickness, considering interference of the illumination light at the layer.