Invention Grant
- Patent Title: MEMS gyroscope with frequency regulation and electrostatic cancellation of the quadrature error
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Application No.: US15458704Application Date: 2017-03-14
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Publication No.: US10444013B2Publication Date: 2019-10-15
- Inventor: Daniele Prati , Carlo Valzasina , Tiziano Chiarillo , Pasquale Franco
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102016000081227 20160802
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/5776 ; G01C19/574

Abstract:
A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.
Public/Granted literature
- US20180038692A1 MEMS GYROSCOPE WITH FREQUENCY REGULATION AND ELECTROSTATIC CANCELLATION OF THE QUADRATURE ERROR Public/Granted day:2018-02-08
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