SEMICONDUCTOR GAS SENSOR DEVICE AND MANUFACTURING METHOD THEREOF
    2.
    发明申请
    SEMICONDUCTOR GAS SENSOR DEVICE AND MANUFACTURING METHOD THEREOF 审中-公开
    半导体气体传感器装置及其制造方法

    公开(公告)号:US20150377813A1

    公开(公告)日:2015-12-31

    申请号:US14725842

    申请日:2015-05-29

    Abstract: A semiconductor gas sensor device includes a first cavity that is enclosed by opposing first and second semiconductor substrate slices. At least one conducting filament is provided to extend over the first cavity, and a passageway is provided to permit gas to enter the first cavity. The sensor device may further including a second cavity that is hermetically enclosed by the opposing first and second semiconductor substrate slices. At least one another conducting filament is provided to extend over the second cavity.

    Abstract translation: 半导体气体传感器装置包括由相对的第一和第二半导体衬底切片包围的第一腔体。 提供至少一个导电细丝以在第一腔上延伸,并且设置通道以允许气体进入第一腔。 传感器装置还可以包括被相对的第一和第二半导体衬底切片气密地包围的第二腔体。 提供至少另一个导电细丝以在第二腔上延伸。

    MEMS gyroscope with frequency regulation and electrostatic cancellation of the quadrature error

    公开(公告)号:US10444013B2

    公开(公告)日:2019-10-15

    申请号:US15458704

    申请日:2017-03-14

    Abstract: A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

    Gas measurement device and measurement method thereof

    公开(公告)号:US09835574B2

    公开(公告)日:2017-12-05

    申请号:US14726823

    申请日:2015-06-01

    CPC classification number: G01N27/121 G01N27/18

    Abstract: A gas measurement device measures gas using a gas sensor including a sense resistance exposed to the gas and a reference resistance not exposed to the gas. The gas measurement device applies a first current value and a second current value to the sensor. A detector functions to detect a first resistance variation and a second resistance variation of the sense resistance exposed to the gas with respect to the reference resistance as a function of the first current value and the second current value, respectively. The resistance variation dependent on relative humidity is then determined as a function of the first and second resistance variations and a first constant. The resistance variation dependent on gas content is then determined as a function of the first and second resistance variations and a second (different) constant.

    Gas measurement device and measurement method thereof

    公开(公告)号:US10451575B2

    公开(公告)日:2019-10-22

    申请号:US15797078

    申请日:2017-10-30

    Abstract: A gas measurement device measures gas using a gas sensor including a sense resistance exposed to the gas and a reference resistance not exposed to the gas. The gas measurement device applies a first current value and a second current value to the sensor. A detector functions to detect a first resistance variation and a second resistance variation of the sense resistance exposed to the gas with respect to the reference resistance as a function of the first current value and the second current value, respectively. The resistance variation dependent on relative humidity is then determined as a function of the first and second resistance variations and a first constant. The resistance variation dependent on gas content is then determined as a function of the first and second resistance variations and a second (different) constant.

    GAS MEASUREMENT DEVICE AND MEASUREMENT METHOD THEREOF

    公开(公告)号:US20180052129A1

    公开(公告)日:2018-02-22

    申请号:US15797078

    申请日:2017-10-30

    CPC classification number: G01N27/121 G01N27/18

    Abstract: A gas measurement device measures gas using a gas sensor including a sense resistance exposed to the gas and a reference resistance not exposed to the gas. The gas measurement device applies a first current value and a second current value to the sensor. A detector functions to detect a first resistance variation and a second resistance variation of the sense resistance exposed to the gas with respect to the reference resistance as a function of the first current value and the second current value, respectively. The resistance variation dependent on relative humidity is then determined as a function of the first and second resistance variations and a first constant. The resistance variation dependent on gas content is then determined as a function of the first and second resistance variations and a second (different) constant.

    MEMS GYROSCOPE WITH FREQUENCY REGULATION AND ELECTROSTATIC CANCELLATION OF THE QUADRATURE ERROR

    公开(公告)号:US20180038692A1

    公开(公告)日:2018-02-08

    申请号:US15458704

    申请日:2017-03-14

    CPC classification number: G01C19/5712 G01C19/574 G01C19/5776

    Abstract: A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

    GAS MEASUREMENT DEVICE AND MEASUREMENT METHOD THEREOF
    9.
    发明申请
    GAS MEASUREMENT DEVICE AND MEASUREMENT METHOD THEREOF 有权
    气体测量装置及其测量方法

    公开(公告)号:US20160003757A1

    公开(公告)日:2016-01-07

    申请号:US14726823

    申请日:2015-06-01

    CPC classification number: G01N27/121 G01N27/18

    Abstract: A gas measurement device measures gas using a gas sensor including a sense resistance exposed to the gas and a reference resistance not exposed to the gas. The gas measurement device applies a first current value and a second current value to the sensor. A detector functions to detect a first resistance variation and a second resistance variation of the sense resistance exposed to the gas with respect to the reference resistance as a function of the first current value and the second current value, respectively. The resistance variation dependent on relative humidity is then determined as a function of the first and second resistance variations and a first constant. The resistance variation dependent on gas content is then determined as a function of the first and second resistance variations and a second (different) constant.

    Abstract translation: 气体测量装置使用包括暴露于气体的感测电阻和不暴露于气体的参考电阻的气体传感器来测量气体。 气体测量装置向传感器施加第一电流值和第二电流值。 检测器用于分别作为第一电流值和第二电流值的函数来检测暴露于气体的感测电阻相对于参考电阻的第一电阻变化和第二电阻变化。 然后根据相对湿度的电阻变化作为第一和第二电阻变化和第一常数的函数来确定。 然后根据气体含量的电阻变化确定为第一和第二电阻变化和第二(不同)常数的函数。

Patent Agency Ranking