Invention Grant
- Patent Title: Supporter pin and heat treatment apparatus having the same
-
Application No.: US15220774Application Date: 2016-07-27
-
Publication No.: US10446433B2Publication Date: 2019-10-15
- Inventor: Jongho Song , Minho Lee
- Applicant: LG DISPLAY CO., LTD. , ZEUS CO., LTD.
- Applicant Address: KR Seoul KR Gyeonggi-do
- Assignee: LG Display Co., Ltd.,Zeus Co., Ltd.
- Current Assignee: LG Display Co., Ltd.,Zeus Co., Ltd.
- Current Assignee Address: KR Seoul KR Gyeonggi-do
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2015-0107930 20150730
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687
Abstract:
A supporter pin and a heat treatment apparatus are provided in which a substrate subject to heat treatment may be supported while preventing itself from damaging the substrate. The supporter pin includes a housing in which a groove is formed; a ball accommodated in the groove and supporting the substrate; and a retainer accommodated in the housing and preventing separation of the ball.
Public/Granted literature
- US20170032998A1 SUPPORTER PIN AND HEAT TREATMENT APPARATUS HAVING THE SAME Public/Granted day:2017-02-02
Information query
IPC分类:
