Invention Grant
- Patent Title: Integrated assemblies having anchoring structures proximate stacked memory cells
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Application No.: US15843509Application Date: 2017-12-15
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Publication No.: US10446566B2Publication Date: 2019-10-15
- Inventor: Kunal R. Parekh , Justin B. Dorhout , Nancy M. Lomeli
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/78 ; G11C16/04 ; H01L27/11556 ; G11C16/08 ; H01L27/1157 ; H01L27/11582 ; H01L27/11565 ; H01L27/11519 ; H01L29/788 ; H01L27/11524

Abstract:
Some embodiments include an assembly having channel material structures extending upwardly from a conductive structure. Anchor structures are laterally offset from the channel material structures and penetrate into the conductive structure to a depth sufficient to provide mechanical stability to at least a portion of the assembly. The conductive structure may include a first conductive material over a second conductive material, and may be a source line of a three-dimensional NAND configuration. Some embodiments include methods of forming assemblies to have channel material structures and anchor structures.
Public/Granted literature
Information query
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