Invention Grant
- Patent Title: Sealed cavity structures with a planar surface
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Application No.: US15876727Application Date: 2018-01-22
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Publication No.: US10446643B2Publication Date: 2019-10-15
- Inventor: Siva P. Adusumilli , Anthony K. Stamper , Laura J. Schutz , Cameron E. Luce
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/49 ; H01L29/51 ; H01L29/78 ; H01L27/12 ; H01L21/84 ; H01L21/762
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to sealed cavity structures having a planar surface and methods of manufacture. The structure includes a cavity formed in a substrate material and which has a curvature at its upper end. The cavity is covered with epitaxial material that has an upper planar surface.
Public/Granted literature
- US20190229185A1 SEALED CAVITY STRUCTURES WITH A PLANAR SURFACE Public/Granted day:2019-07-25
Information query
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