- 专利标题: Thin-film capacitor including groove portions
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申请号: US15603743申请日: 2017-05-24
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公开(公告)号: US10460877B2公开(公告)日: 2019-10-29
- 发明人: Atsuhiro Tsuyoshi , Akifumi Kamijima
- 申请人: TDK CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: TDK CORPORATION
- 当前专利权人: TDK CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff PLC
- 优先权: JP2016-106387 20160527; JP2016-106392 20160527; JP2017-077075 20170407
- 主分类号: H01G4/33
- IPC分类号: H01G4/33 ; H01G4/012 ; H01G4/232 ; H01G4/10 ; H01G4/008
摘要:
In a thin-film capacitor, a first extraction electrode provided along a side surface of a first groove portion is in contact with a first electrode layer and is not in contact with a second electrode layer. Also, a second extraction electrode provided along a side surface of a second groove portion is in contact with the second electrode layer exposed on the side surface of the second groove portion and is not in contact with the first electrode layer. Thus, a capacitor structure in which the first electrode layer in contact with the first extraction electrode and the second electrode layer in contact with the second extraction electrode are laminated with a dielectric layer therebetween is formed between the first groove portion and the second groove portion.
公开/授权文献
- US20170345576A1 THIN-FILM CAPACITOR 公开/授权日:2017-11-30
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