Metamaterial oxide capacitor
    3.
    发明授权

    公开(公告)号:US11791096B1

    公开(公告)日:2023-10-17

    申请号:US18189053

    申请日:2023-03-23

    申请人: Hulya Demiryont

    发明人: Hulya Demiryont

    摘要: A capacitor may comprise a substrate and a first electrically conductive electrode layer. A metal oxide layer may be deposited on at least one of the substrate or the first electrically conductive electrode layer. A proximal region of the metal oxide may comprise a stoichiometric, dielectric, oxygen vacancy-free portion of the metal oxide. The proximal region may be in communication with the first electrically conductive electrode layer. A distal region of the metal oxide may comprise a constant oxygen vacancy portion. The distal region may be in communication with a second electrically conductive electrode layer. The metal oxide may comprise a gradient region comprising a substantially stoichiometric metal oxide portion and a substantially constant oxygen vacancy portion. The gradient region may comprise an increasing oxygen vacancy gradient from the proximal region to the distal region. The second electrically conductive electrode layer may be deposited on the distal region.

    Vertically-stacked interdigitated metal-insulator-metal capacitor for sub-20 nm pitch

    公开(公告)号:US11715594B2

    公开(公告)日:2023-08-01

    申请号:US17303390

    申请日:2021-05-27

    摘要: An interdigitated metal-insulator-metal capacitor structure is formed by a first unitary body of a first conductive material that includes a first metal plate, a first set of interdigitated electrodes protruding upwards from a top surface of the first metal plate, and a first set of connecting vias protruding downwards from a bottom surface of the first metal plate. A second unitary body of a second conductive material is disposed above the first unitary body and electrically separated from the first unitary body by an insulating layer. The second unitary body includes a second metal plate, a second set of interdigitated electrodes protruding downwards from a bottom surface of the second metal plate, and a second set of connecting vias protruding upwards from a top surface of the second metal plate. The first set of interdigitated electrodes are interleaved with the second set of interdigitated electrodes.

    Front and back electrode trench capacitor

    公开(公告)号:US11605503B2

    公开(公告)日:2023-03-14

    申请号:US16781459

    申请日:2020-02-04

    IPC分类号: H01G4/10 H01G4/008

    摘要: A capacitor that includes an insulating base material having a first main surface and a second main surface facing each other, the insulating base material defining first and second trenches extending from the first main surface into the base material such that first trench and the second trench overlap each other; a first conductor in the first trench; a first external electrode on the first main surface of the base material and connected to the first conductor; a second conductor in the second trench; and a second external electrode on the second main surface of the base material and connected to the second conductor.