Invention Grant
- Patent Title: Radio frequency switches with air gap structures
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Application No.: US15645655Application Date: 2017-07-10
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Publication No.: US10461152B2Publication Date: 2019-10-29
- Inventor: Anthony K. Stamper , Steven M. Shank , John J. Ellis-Monaghan , Siva P. Adusumilli
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Andrew M. Calderon; Anthony Canale
- Main IPC: H01L21/764
- IPC: H01L21/764 ; H01L29/06 ; H01L23/66 ; H01L29/10 ; H01L29/78
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to radio frequency (RF) switches with airgap structures and methods of manufacture. The structure includes a substrate with at least one airgap structure formed in a well region under at least one gate structure, and which extends to a junction formed by a source/drain region of the at least one gate structure.
Public/Granted literature
- US20190013382A1 RADIO FREQUENCY SWITCHES WITH AIR GAP STRUCTURES Public/Granted day:2019-01-10
Information query
IPC分类:
