Invention Grant
- Patent Title: Grating, method for manufacturing grating, and method for recycling grating
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Application No.: US15594886Application Date: 2017-05-15
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Publication No.: US10466414B2Publication Date: 2019-11-05
- Inventor: Hirotaka Miyamoto , Osamu Wakabayashi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G02B6/12 ; B44C1/22 ; F21V8/00 ; H01S3/1055 ; H01S3/225 ; G02B6/00 ; G02B26/08 ; H01S3/08
Abstract:
A grating for line-narrowing a laser beam that is outputted from a laser apparatus at a wavelength in a vacuum ultraviolet region may include: a grating substrate; a first aluminum metal film formed above the grating substrate, the first aluminum metal film having grooves in a surface thereof; and a first protective film formed by an ALD method above the first aluminum metal film.
Public/Granted literature
- US20170248758A1 GRATING, METHOD FOR MANUFACTURING GRATING, AND METHOD FOR RECYCLING GRATING Public/Granted day:2017-08-31
Information query
