Invention Grant
- Patent Title: Treatment liquid supply device using syringe, and wet treatment device
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Application No.: US15532846Application Date: 2015-12-02
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Publication No.: US10478867B2Publication Date: 2019-11-19
- Inventor: Shiro Hara , Sommawan Khumpuang , Akio Kobayashi , Takeshi Umino , Sonoko Matsuda
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-244226 20141202
- International Application: PCT/JP2015/083868 WO 20151202
- International Announcement: WO2016/088798 WO 20160609
- Main IPC: B08B3/04
- IPC: B08B3/04 ; B08B3/08 ; B08B3/12 ; H01L21/67

Abstract:
A treatment liquid supply device and a wet treatment device with which an extremely small quantity of the treatment liquid can be accurately supplied, as a method for supplying a treatment liquid to an extremely small wafer of half inch size, including: a syringe that sucks and discharges the treatment liquid; a treatment liquid bottle that is filled with the treatment liquid; a suction hose that has one end connected to the treatment liquid bottle and the other end connected to the syringe, and sucks the treatment liquid inside the treatment liquid bottle to the syringe; a supply hose that has one end connected to an intermediate section of the suction hose and serves to supply, to the surface of the wafer, the treatment liquid discharged by the syringe; and a three-way solenoid valve that controls opening/closing of each of the suction and supply hoses.
Public/Granted literature
- US20180001354A1 TREATMENT LIQUID SUPPLY DEVICE USING SYRINGE, AND WET TREATMENT DEVICE Public/Granted day:2018-01-04
Information query
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