Invention Grant
- Patent Title: Pad conditioner having reduced friction and method of manufacturing the same
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Application No.: US13081981Application Date: 2011-04-07
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Publication No.: US10478941B2Publication Date: 2019-11-19
- Inventor: So Young Yoon , Joo Han Lee , Jong Jae Lee
- Applicant: So Young Yoon , Joo Han Lee , Jong Jae Lee
- Applicant Address: KR Osan-si
- Assignee: EHWA DIAMOND IND. CO., LTD.
- Current Assignee: EHWA DIAMOND IND. CO., LTD.
- Current Assignee Address: KR Osan-si
- Agency: Stein IP, LLC
- Priority: KR10-2010-0032258 20100408
- Main IPC: B24B53/12
- IPC: B24B53/12 ; B24D18/00 ; B24D3/00 ; B24B53/017

Abstract:
This invention relates to a conditioner for a chemical mechanical planarization pad, which is necessary for global planarization of a wafer in order to increase the degree of integration of a semiconductor device, and more particularly to a pad conditioner having a structure able to reduce friction with a pad so as to solve the problems caused by a lot of friction being generated upon conditioning, and to a method of manufacturing the same.
Public/Granted literature
- US20110250826A1 PAD CONDITIONER HAVING REDUCED FRICTION AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-10-13
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