Invention Grant
- Patent Title: TFT and manufacturing method thereof, array substrate and manufacturing method thereof, and display device
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Application No.: US15300362Application Date: 2015-10-19
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Publication No.: US10483296B2Publication Date: 2019-11-19
- Inventor: Wei Yang , Xiang Liu
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201510308890 20150608
- International Application: PCT/CN2015/092206 WO 20151019
- International Announcement: WO2016/197502 WO 20161215
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/425 ; H01L29/423 ; H01L29/66 ; H01L29/786 ; G02F1/1362 ; G02F1/1368 ; H01L27/32

Abstract:
A thin-film transistor (TFT) and a manufacturing method thereof, an array substrate and a manufacturing method thereof, and a display device are disclosed. The manufacturing method of a TFT includes: forming an active layer, a gate electrode, a source electrode and a drain electrode respectively electrically connected with the active layer, and a gate insulating layer disposed between the gate electrode and the active layer, so that the gate electrode, the source electrode and the drain electrode are formed in the same patterning process. The method can reduce the number of masks used in the manufacturing process of the TFT or an array substrate, reduce the technology process, improve the productivity, and reduce the production cost.
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