Invention Grant
- Patent Title: Isolation structure for reducing crosstalk between pixels and fabrication method thereof
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Application No.: US15448690Application Date: 2017-03-03
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Publication No.: US10483310B2Publication Date: 2019-11-19
- Inventor: Yun-Wei Cheng , Yin-Chieh Huang , Chun-Hao Chou , Kuo-Cheng Lee , Hsun-Ying Huang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An isolation structure and a method for fabricating the same are provided. The isolation structure includes a reflective layer, a first dielectric layer and a second dielectric layer. A dielectric constant of the first dielectric layer is different from that of the second dielectric layer. In the method for fabricating the isolation structure, at first, a semiconductor substrate is provided. Then, a first reflective layer is formed on the semiconductor substrate. Thereafter, the first dielectric layer is formed on the reflective layer. Thereafter, the second dielectric layer is on the first dielectric layer. Then, the first reflective layer, the first dielectric layer and the second dielectric layer are etched to form a grid structure. Thereafter, a passivation layer is formed to cover the etched first reflective layer, the etched first dielectric layer and the etched second dielectric layer.
Public/Granted literature
- US20180254294A1 ISOLATION STRUCTURE FOR REDUCING CROSSTALK BETWEEN PIXELS AND FABRICATION METHOD THEREOF Public/Granted day:2018-09-06
Information query
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