Invention Grant
- Patent Title: Transistor including tensile-strained germanium channel
-
Application No.: US15778863Application Date: 2015-12-24
-
Publication No.: US10483353B2Publication Date: 2019-11-19
- Inventor: Chandra S. Mohapatra , Glenn A. Glass , Anand S. Murthy , Karthik Jambunathan , Willy Rachmady , Gilbert Dewey , Tahir Ghani , Jack T. Kavalieros
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2015/000414 WO 20151224
- International Announcement: WO2017/111848 WO 20170629
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10 ; H01L21/8238 ; H01L29/423 ; H01L29/66 ; H01L29/739 ; H01L27/092 ; H01L29/786

Abstract:
Techniques are disclosed for forming transistor structures including tensile-strained germanium (Ge) channel material. The transistor structures may be used for either or both of n-type and p-type transistor devices, as tensile-strained Ge has very high carrier mobility properties suitable for both types. Thus, a simplified CMOS integration scheme may be achieved by forming n-MOS and p-MOS devices included in the CMOS device using the techniques described herein. In some cases, the tensile-strained Ge may be achieved by epitaxially growing the Ge material on a group III-V material having a lattice constant that is higher than that of Ge and/or by applying a macroscopic 3-point bending to the die on which the transistor is formed. The techniques may be used to form transistors having planar or non-planar configurations, such as finned configurations (e.g., finFET or tri-gate) or gate-all-around (GAA) configurations (including at least one nanowire).
Public/Granted literature
- US20180358440A1 TRANSISTOR INCLUDING TENSILE-STRAINED GERMANIUM CHANNEL Public/Granted day:2018-12-13
Information query
IPC分类: