Invention Grant
- Patent Title: Methods of forming a gate contact structure above an active region of a transistor
-
Application No.: US15581105Application Date: 2017-04-28
-
Publication No.: US10483363B2Publication Date: 2019-11-19
- Inventor: Ruilong Xie , Hao Tang , Cheng Chi , Daniel Chanemougame , Lars W. Liebmann , Mark V. Raymond
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L21/768 ; H01L29/66 ; H01L21/285 ; H01L23/535 ; H01L29/45 ; H01L29/78

Abstract:
One method includes forming a gate above a semiconductor substrate, the gate comprising a gate structure and a gate cap positioned above the gate structure, forming a conductive source/drain metallization structure adjacent the gate in each of the source/drain regions and forming a recess in each of the conductive source/drain metallization structures. The method further includes forming a spacer structure that comprises recess filling portions that substantially fill the recesses and a portion that extends across the gate cap, wherein a portion of the gate cap is exposed within the spacer structure, forming an insulating material within the spacer structure and on the exposed portion of the gate cap, forming a gate contact opening that exposes a portion of an upper surface of the gate structure and forming a conductive gate contact structure (CB) in the conductive gate contact opening.
Public/Granted literature
- US20180315822A1 METHODS OF FORMING A GATE CONTACT STRUCTURE ABOVE AN ACTIVE REGION OF A TRANSISTOR Public/Granted day:2018-11-01
Information query
IPC分类: