Invention Grant
- Patent Title: Apparatus comprising a plurality of nanowires
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Application No.: US14977719Application Date: 2015-12-22
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Publication No.: US10483535B2Publication Date: 2019-11-19
- Inventor: Marko Lemke , Stefan Tegen , Uwe Rudolph
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Viering, Jentschura & Partner mbB
- Main IPC: H01M4/36
- IPC: H01M4/36 ; H01M4/38 ; H01L21/3065 ; H01L29/06 ; H01L29/16 ; H01M4/66 ; H01M10/0525 ; C01B32/05 ; B82Y40/00 ; H01M4/02
Abstract:
A method for manufacturing a plurality of nanowires, the method including: providing a carrier comprising an exposed surface of a material to be processed and applying a plasma treatment on the exposed surface of the material to be processed to thereby form a plurality of nanowires from the material to be processed during the plasma treatment.
Public/Granted literature
- US20160111719A1 METHOD FOR MANUFACTURING A PLURALITY OF NANOWIRES Public/Granted day:2016-04-21
Information query
