- 专利标题: Photonic device comprising a laser optically connected to a silicon wave guide and method of fabricating such a photonic device
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申请号: US15873465申请日: 2018-01-17
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公开(公告)号: US10483716B2公开(公告)日: 2019-11-19
- 发明人: Sylvie Menezo , Torrey Lane Thiessen , Joyce Kai See Poon
- 申请人: Commissariat à I'énergie atomique et aux énergies alternatives
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Pearne & Gordon LLP
- 优先权: FR1750441 20170119
- 主分类号: H01S5/026
- IPC分类号: H01S5/026 ; H01S5/10 ; H01S5/125 ; H01S5/042 ; H01S5/02 ; H01S5/12 ; H01S5/30
摘要:
A photonic device comprising: a support; an intermediate layer comprising at least one dielectric material and a first and second excess thickness of silicon separated from each other by a space; a first patterned silicon layer at least partially forming a waveguide, and first to fifth waveguide sections; a first dielectric layer covering the first silicon layer and a gain structure comprising at least one gain medium in contact with the first dielectric layer; the second and fourth wave guide sections, the first and second excess thicknesses of silicon, and the first and second ends of the gain structure forming a first and second optical transition zone between a hybrid laser waveguide, formed by a central portion of the gain structure, the space and the third waveguide section and the first and fifth waveguide sections respectively. The invention also relates to a method of fabricating such a photonic device.
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