Invention Grant
- Patent Title: Via and skip via structures
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Application No.: US15647400Application Date: 2017-07-12
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Publication No.: US10485111B2Publication Date: 2019-11-19
- Inventor: Shao Beng Law , Nicholas V. LiCausi , Errol Todd Ryan , James McMahon , Ryan S. Smith , Xunyuan Zhang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H05K3/46
- IPC: H05K3/46 ; H05K3/40 ; H05K1/11 ; H01L21/768

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to via and skip via structures and methods of manufacture. The method includes: forming a first metallization layer with a first capping layer over the first metallization layer; forming a second metallization layer with a second capping layer over the second metallization layer; forming a partial skip via structure to the first metallization layer by removing a portion of the first capping layer and the second capping and depositing conductive material in an opening formed in the second metallization layer; forming a third capping layer over the filled partial skip via and the second capping layer; and forming a remaining portion of a skip via structure in alignment with the partial skip via structure by opening the third capping layer to expose the conductive material of the partial skip via.
Public/Granted literature
- US20190021176A1 VIA AND SKIP VIA STRUCTURES Public/Granted day:2019-01-17
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