- 专利标题: Thin film transistor and display substrate, fabrication method thereof, and display device
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申请号: US15768634申请日: 2017-10-30
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公开(公告)号: US10504944B2公开(公告)日: 2019-12-10
- 发明人: Shi Shu , Chuanxiang Xu , Teng Luo , Feng Gu , Bin Zhang
- 申请人: BOE TECHNOLOGY GROUP CO., LTD.
- 申请人地址: CN Beijing
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人地址: CN Beijing
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: CN201710197332 20170329
- 国际申请: PCT/CN2017/108322 WO 20171030
- 国际公布: WO2018/176829 WO 20181004
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; G02F1/1362 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/786 ; G02F1/1368 ; H01L27/32 ; G02F1/1343 ; H01L21/02 ; H01L21/30
摘要:
A method for fabricating a thin film transistor includes providing a substrate (100); forming a semiconductor layer (105) over the substrate (100); forming a source-drain metal layer (106) over the semiconductor layer (105); applying one patterning process to the semiconductor layer (105) and the source-drain metal layer (106) to form an active layer (1), a source electrode (2), and a drain electrode (3); forming a gate insulating layer (101) and an interlayer insulating layer (102) that cover the active layer (1), the source electrode (2), and the drain electrode (3); applying a patterning process to the interlayer insulating layer (102) to form a first window (10) in the interlayer insulating layer (102) to expose a portion of the gate insulating layer (101); and forming a gate electrode (4) in the first window (10). An orthogonal projection of the gate electrode (4) on the substrate (100) is in an orthogonal projection of the active layer (1) on the substrate (100).
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