Invention Grant
- Patent Title: Semiconductor package with air pressure sensor
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Application No.: US14951422Application Date: 2015-11-24
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Publication No.: US10508961B2Publication Date: 2019-12-17
- Inventor: Kevin L. Lin , Qing Ma , Feras Eid , Johanna Swan , Weng Hong Teh
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Womble Bond Dickinson (US) LLP
- Main IPC: G01L9/00
- IPC: G01L9/00 ; B81B7/00 ; B81C1/00 ; H01L23/00 ; H01L29/84

Abstract:
A semiconductor package having an air pressure sensor and methods to form a semiconductor package having an air pressure sensor are described. For example, a semiconductor package includes a plurality of build-up layers. A cavity is disposed in one or more of the build-up layers. An air pressure sensor is disposed in the plurality of build-up layers and includes the cavity and an electrode disposed above the cavity.
Public/Granted literature
- US20160076961A1 SEMICONDUCTOR PACKAGE WITH AIR PRESSURE SENSOR Public/Granted day:2016-03-17
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