Invention Grant
- Patent Title: Middle of the line self-aligned direct pattern contacts
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Application No.: US15868479Application Date: 2018-01-11
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Publication No.: US10522403B2Publication Date: 2019-12-31
- Inventor: Jason E. Stephens , Daniel Chanemougame , Ruilong Xie , Lars W. Liebmann , Gregory A. Northrop
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/528

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to middle of the line self-aligned direct pattern contacts and methods of manufacture. The structures described herein include: at least one gate structure with a metallization and source/drain regions; a source/drain contact in electrical connection with the source/drain regions, respectively; and a contact structure with a re-entrant profile in electrical connection with the source/drain contact and the metallization of the at least one gate structure, respectively.
Public/Granted literature
- US20190214298A1 MIDDLE OF THE LINE SELF-ALIGNED DIRECT PATTERN CONTACTS Public/Granted day:2019-07-11
Information query
IPC分类: