Invention Grant
- Patent Title: Ceramic carrier and sensor element, heating element and sensor module, each with a ceramic carrier and method for manufacturing a ceramic carrier
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Application No.: US15129288Application Date: 2015-03-25
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Publication No.: US10529470B2Publication Date: 2020-01-07
- Inventor: Thomas Loose , Stefan Dietmann , Alfred Fleckenstein , Dieter Teusch
- Applicant: HERAEUS SENSOR TECHNOLOGY GMBH
- Applicant Address: DE Kleinostheim
- Assignee: HERAEUS NEXENSOS GMBH
- Current Assignee: HERAEUS NEXENSOS GMBH
- Current Assignee Address: DE Kleinostheim
- Agency: Shakir Law PLLC
- Agent Hassan Abbas Shakir
- Priority: DE102014104219 20140326
- International Application: PCT/EP2015/056356 WO 20150325
- International Announcement: WO2015/144748 WO 20151001
- Main IPC: H01C1/016
- IPC: H01C1/016 ; H01C7/00 ; G01K7/18 ; H01C3/12 ; H01C17/08 ; H01C17/065 ; H05B3/12 ; H01C17/075 ; G01N15/00 ; G01N15/06

Abstract:
An Al2O3 carrier has a thin-film structure of platinum or a platinum alloy arranged thereon. The carrier and/or the thin-film structure are adapted to reduce mechanical stresses owing to different thermal expansion coefficients. The carrier and/or the thin-film structure include a surface of the carrier in the region of the thin-film structure is smoothed at least in sections to reduce the adhesion and/or a surface of the carrier has an intermediate layer on which the thin-film structure is arranged. The thermal expansion coefficient of the intermediate layer is from 8*10−6/K to 16*10−6/K, in particular from 8.5*10−6/K to 14*10−6/K, and/or the thin-film structure has at least one conductor path that is undular at least in sections, said conductor path extends laterally along the surface of the carrier.
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