Invention Grant
- Patent Title: Mechanical structure comprising an actuator and mechanical amplification means, and production method
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Application No.: US15515856Application Date: 2015-09-30
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Publication No.: US10532379B2Publication Date: 2020-01-14
- Inventor: Fabrice Casset , Skandar Basrour , Cédrick Chappaz , Jean-Sébastien Danel
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , STMicroelectronics (Crolles 2) SAS , UNIVERSITE GRENOBLE ALPES
- Applicant Address: FR Paris FR Crolles FR Saint Martin d'Heres
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS (CROLLES 2) SAS,UNIVERSITÉ GRENOBLE ALPES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS (CROLLES 2) SAS,UNIVERSITÉ GRENOBLE ALPES
- Current Assignee Address: FR Paris FR Crolles FR Saint Martin d'Heres
- Agency: Baker & Hostetler LLP
- Priority: FR1459430 20141002
- International Application: PCT/EP2015/072536 WO 20150930
- International Announcement: WO2016/050832 WO 20160407
- Main IPC: H01L41/09
- IPC: H01L41/09 ; B06B3/00 ; B81B3/00 ; B06B1/04 ; B06B1/06 ; H01L41/18 ; H01L41/25
Abstract:
A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.
Public/Granted literature
- US20170304867A1 MECHANICAL STRUCTURE COMPRISING AN ACTUATOR AND MECHANICAL AMPLIFICATION MEANS, AND PRODUCTION METHOD Public/Granted day:2017-10-26
Information query
IPC分类:
