Invention Grant
- Patent Title: Polishing apparatus and wafer polishing method
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Application No.: US15512957Application Date: 2015-09-25
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Publication No.: US10532442B2Publication Date: 2020-01-14
- Inventor: Michito Sato , Junichi Ueno , Kaoru Ishii , Hiromi Kishida , Yuya Nakanishi , Ryosuke Yoda , Yosuke Kanai
- Applicant: SHIN-ETSU HANDOTAI CO., LTD. , FUJIKOSHI MACHINERY CORP.
- Applicant Address: JP Tokyo JP Nagano
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.,FUJIKOSHI MACHINERY CORP.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.,FUJIKOSHI MACHINERY CORP.
- Current Assignee Address: JP Tokyo JP Nagano
- Agency: Oliff PLC
- Priority: JP2014-214798 20141021
- International Application: PCT/JP2015/004874 WO 20150925
- International Announcement: WO2016/063457 WO 20160428
- Main IPC: B24B37/34
- IPC: B24B37/34 ; B24B27/00 ; B24B25/00 ; B24B37/04 ; B24B53/017 ; H01L21/304

Abstract:
A polishing apparatus which is an index system polishing apparatus which includes a polishing head for holding a wafer, a plurality of turn tables to which polishing pads for polishing the wafer are attached, and a loading/unloading stage for loading the wafer to the polishing head or unloading the wafer from the polishing head, and which polishes the wafer while switching the turn tables to be used for polishing the wafer held at the polishing head by causing the polishing head to perform rotation movement, the polishing apparatus including a turn table upward and downward movement mechanism which allows the turn table to move upward and downward. With this polishing apparatus, it is possible to reduce an amount of displacement caused when moment load is applied on the polishing head during polishing.
Public/Granted literature
- US20170304992A1 POLISHING APPARATUS AND WAFER POLISHING METHOD Public/Granted day:2017-10-26
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