Invention Grant
- Patent Title: Vertical hall-effect sensor for detecting two-dimensional in-plane magnetic fields
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Application No.: US15709866Application Date: 2017-09-20
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Publication No.: US10534045B2Publication Date: 2020-01-14
- Inventor: Keith Ryan Green , Byron Jon Roderick Shulver , Iouri Mirgorodski
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: G01R33/07
- IPC: G01R33/07 ; G01R33/00 ; H01L43/14 ; H01L27/22 ; G01D5/14

Abstract:
A microelectronic device includes a vertical Hall sensor for measuring magnetic fields in two dimensions. In one implementation, the disclosed microelectronic device involves a vertical Hall plate with a cross-shaped upper terminal and a lower terminal which includes a buried layer. The cross-shaped upper terminal has a length-to-width ratio of 5 to 12 where it contacts the vertical Hall plate. The length is measured from one end of one arm of the cross-shaped upper terminal to an opposite end of an opposite arm. The width is an average width of both arms. Hall sense taps are located outside of the cross-shaped upper terminal. Current returns connect to the buried layer.
Public/Granted literature
- US20190086484A1 VERTICAL HALL-EFFECT SENSOR FOR DETECTING TWO-DIMENSIONAL IN-PLANE MAGNETIC FIELDS Public/Granted day:2019-03-21
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