- Patent Title: Magnification compensation and/or beam steering in optical systems
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Application No.: US16011564Application Date: 2018-06-18
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Publication No.: US10539770B2Publication Date: 2020-01-21
- Inventor: Yanrong Yuan , John Bjorkman , Paul Ferrari , Jeff Hansen
- Applicant: SUSS MicroTec Photonic Systems Inc.
- Applicant Address: US CA Corona
- Assignee: SUSS MICROTEC PHOTONIC SYSTEMS INC.
- Current Assignee: SUSS MICROTEC PHOTONIC SYSTEMS INC.
- Current Assignee Address: US CA Corona
- Agency: Haynes and Boone, LLP
- Main IPC: G02B17/08
- IPC: G02B17/08 ; G02B7/09 ; G02B17/00 ; G03F7/20 ; G02B7/10 ; H01L21/68 ; G03B27/42 ; G02B15/177 ; G02B13/26

Abstract:
Techniques are disclosed for magnification compensation and/or beam steering in optical systems. An optical system may include a lens system to receive first radiation associated with an object and direct second radiation associated with an image of the object toward an image plane. The lens system may include a set of lenses, and an actuator system to selectively adjust the set of lenses to adjust a magnification associated with the image symmetrically along a first and a second direction. The lens system may also include a beam steering lens to direct the first radiation to provide the second radiation. In some examples, the lens system may also include a second set of lenses, where the actuator system may also selectively adjust the second set of lenses to adjust the magnification along the first or the second direction. Related methods are also disclosed.
Public/Granted literature
- US20180364463A1 MAGNIFICATION COMPENSATION AND/OR BEAM STEERING IN OPTICAL SYSTEMS Public/Granted day:2018-12-20
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |