- 专利标题: Semiconductor device with reduced contact resistance
-
申请号: US15245756申请日: 2016-08-24
-
公开(公告)号: US10541172B2公开(公告)日: 2020-01-21
- 发明人: Kangguo Cheng , Sean Teehan , Alex J. Varghese
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/532 ; H01L23/31 ; H01L23/535
摘要:
An interconnect structure and methods of forming the interconnect structure an interconnect dielectric including at least one contact landing within the interconnect dielectric and/or underlying the interconnect dielectric. The structure and methods include roughening an exposed surface of at least one contact landing to increase the surface area of a conductive metal subsequently disposed in a contact feature and in direct contact with the roughened surface of the least one contact landing.
公开/授权文献
- US20180061762A1 SEMICONDUCTOR DEVICE WITH REDUCED CONTACT RESISTANCE 公开/授权日:2018-03-01
信息查询
IPC分类: