Invention Grant
- Patent Title: One-piece process kit shield
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Application No.: US14960890Application Date: 2015-12-07
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Publication No.: US10546733B2Publication Date: 2020-01-28
- Inventor: Kirankumar Savandaiah , Ryan Hanson , Ruxiao An
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/34 ; H01J37/32
Abstract:
Embodiments of process kit shields and process chambers incorporating same are provided herein. In some embodiments, a one-piece process kit shield includes a cylindrical body having an upper portion and a lower portion; a heat transfer channel extending through the upper portion; and a cover ring section extending radially inward from the lower portion.
Public/Granted literature
- US20160189938A1 ONE-PIECE PROCESS KIT SHIELD Public/Granted day:2016-06-30
Information query
IPC分类:
