Invention Grant
- Patent Title: Thin film transistor and display substrate, fabrication method thereof, and display device
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Application No.: US15768634Application Date: 2017-10-30
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Publication No.: US10546885B2Publication Date: 2020-01-28
- Inventor: Shi Shu , Chuanxiang Xu , Teng Luo , Feng Gu , Bin Zhang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: CN201710197332 20170329
- International Application: PCT/CN2017/108322 WO 20171030
- International Announcement: WO2018/176829 WO 20181004
- Main IPC: H01L27/12
- IPC: H01L27/12 ; G02F1/1362 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/786 ; G02F1/1368 ; H01L27/32 ; G02F1/1343 ; H01L21/02 ; H01L21/30

Abstract:
A method for fabricating a thin film transistor includes providing a substrate (100); forming a semiconductor layer (105) over the substrate (100); forming a source-drain metal layer (106) over the semiconductor layer (105); applying one patterning process to the semiconductor layer (105) and the source-drain metal layer (106) to form an active layer (1), a source electrode (2), and a drain electrode (3); forming a gate insulating layer (101) and an interlayer insulating layer (102) that cover the active layer (1), the source electrode (2), and the drain electrode (3); applying a patterning process to the interlayer insulating layer (102) to form a first window (10) in the interlayer insulating layer (102) to expose a portion of the gate insulating layer (101); and forming a gate electrode (4) in the first window (10). An orthogonal projection of the gate electrode (4) on the substrate (100) is in an orthogonal projection of the active layer (1) on the substrate (100).
Public/Granted literature
- US10504944B2 Thin film transistor and display substrate, fabrication method thereof, and display device Public/Granted day:2019-12-10
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