Invention Grant
- Patent Title: Method of producing metal electrode, array substrate and method of producing the same, display device
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Application No.: US15970803Application Date: 2018-05-03
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Publication No.: US10551696B2Publication Date: 2020-02-04
- Inventor: Xiaolong Li , Xiaoxiang Zhang , Huibin Guo , Mingxuan Liu , Wenqing Xu , Zumou Wu , Yongzhi Song
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Kinney & Lange, P.A.
- Priority: CN201710888219 20170927
- Main IPC: H01L21/027
- IPC: H01L21/027 ; G02F1/1343 ; H01L27/12 ; H01L29/45 ; H01L29/49 ; H01L29/786 ; G02F1/1335 ; H01L21/3213

Abstract:
The present disclosure relates to a metal electrode, an array substrate and a method of producing the same, and a display device. In an embodiment, the method includes: forming a protection layer on a metal layer; patterning the protection layer to form a protection pattern, a profile of the protection pattern being the same as a profile of a predetermined pattern of the metal electrode; and etching a part of the metal layer not covered by the protection pattern to form the metal electrode, the metal electrode being covered by the protection pattern, wherein an etching anisotropy of the protection layer is larger than an etching anisotropy of the metal layer.
Public/Granted literature
- US20190094597A1 METHOD OF PRODUCING METAL ELECTRODE, ARRAY SUBSTRATE AND METHOD OF PRODUCING THE SAME, DISPLAY DEVICE Public/Granted day:2019-03-28
Information query
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