- Patent Title: Select gate self-aligned patterning in split-gate flash memory cell
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Application No.: US15971159Application Date: 2018-05-04
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Publication No.: US10553596B2Publication Date: 2020-02-04
- Inventor: Xiangzheng Bo , Douglas Tad Grider, III , John MacPeak
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L27/11521
- IPC: H01L27/11521 ; H01L29/423 ; H01L27/11529 ; G11C16/04

Abstract:
A split-gate flash memory cell (cell) that can be formed by a method including self-aligned patterning for the select gates includes a semiconductor surface. A first control gate (CG) on a first floating gate (FG) and a second CG on a second FG are on the semiconductor surface. A common source/drain is between the first and second FG. A first select gate and a second select gate are on a select gate dielectric layer that is between a first BL source/drain in the semiconductor surface and the first FG and between a second BL source/drain and the second FG, respectively. The first select gate and the second select gate are spacer-shaped.
Public/Granted literature
- US20180254281A1 SELECT GATE SELF-ALIGNED PATTERNING IN SPLIT-GATE FLASH MEMORY CELL Public/Granted day:2018-09-06
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