Invention Grant
- Patent Title: Method of manufacturing display device including multilayered lines arranged at fine intervals
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Application No.: US16026742Application Date: 2018-07-03
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Publication No.: US10553625B2Publication Date: 2020-02-04
- Inventor: In Kyung Yoo , Chong Sup Chang , Dong Hyun Yang
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2017-0181007 20171227
- Main IPC: H01L21/32
- IPC: H01L21/32 ; H01L27/12 ; H01L21/3213

Abstract:
A method of manufacturing a display device, includes providing a substrate including a first stepped part, forming a metal layer on the substrate and the first stepped part, forming an organic layer pattern on the metal layer at a position corresponding to a sidewall of the stepped part, forming a photosensitive layer on the metal layer and the organic layer pattern, patterning the photosensitive layer to form a photosensitive layer pattern adjacent to the organic layer pattern, and forming a metal line by removing the organic layer pattern and an exposed portion of the metal layer through an etching process using the photosensitive layer pattern as a mask.
Public/Granted literature
- US20190198535A1 METHOD OF MANUFACTURING DISPLAY DEVICE INCLUDING MULTILAYERED LINES ARRANGED AT FINE INTERVALS Public/Granted day:2019-06-27
Information query
IPC分类: