Invention Grant
- Patent Title: Method of controlling ion energy distribution using a pulse generator with a current-return output stage
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Application No.: US15976728Application Date: 2018-05-10
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Publication No.: US10555412B2Publication Date: 2020-02-04
- Inventor: Leonid Dorf , Olivier Luere , Rajinder Dhindsa , James Rogers , Sunil Srinivasan , Anurag Kumar Mishra
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46 ; H01J37/34 ; H01J37/08 ; C23C14/34 ; C23C14/54
Abstract:
Embodiments of this disclosure describe an electrode biasing scheme that enables maintaining a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate that consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
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