Invention Grant
- Patent Title: Discrete source mask optimization
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Application No.: US16257423Application Date: 2019-01-25
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Publication No.: US10558124B2Publication Date: 2020-02-11
- Inventor: Xiaofeng Liu , Rafael C. Howell
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A method for improving a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus, the method including: calculating a discrete pupil profile based on a desired pupil profile; selecting a discrete change to the discrete pupil profile; and applying the selected discrete change to the discrete pupil profile. The methods according to various embodiments disclosed herein may reduce the computational cost of discrete optimization from O(an) to O(n) wherein a is constant and n is the number of knobs that can generate discrete change in the pupil profile.
Public/Granted literature
- US20190155165A1 DISCRETE SOURCE MASK OPTIMIZATION Public/Granted day:2019-05-23
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