Invention Grant
- Patent Title: Liquid dielectric electrostatic MEMS switch and method of fabrication thereof
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Application No.: US15735213Application Date: 2016-06-14
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Publication No.: US10559443B2Publication Date: 2020-02-11
- Inventor: Mohammed Affan Zidan , Jurgen Kosel , Khaled Nabil Salama
- Applicant: King Abdullah University of Science and Technology
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- International Application: PCT/IB2016/053504 WO 20160614
- International Announcement: WO2016/203369 WO 20161222
- Main IPC: H01H59/00
- IPC: H01H59/00 ; H01H49/00

Abstract:
A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.
Public/Granted literature
- US20180174788A1 Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof Public/Granted day:2018-06-21
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