A manufacturing method includes forming a superconductive thin-film layer on a substrate and processing the superconductive thin-film layer into a shape of a detection coil for magnetic resonance measurement. Accordingly, a superconductive thin-film layer having the detection coil shape can be formed. The method further includes irradiating the shape-processed superconductive thin-film layer with ions. Accordingly, lattice defects serving as pinning can be formed in the superconductive thin-film layer.