公开(公告)号：US20180024207A1

公开(公告)日：2018-01-25

申请号：US15654049

申请日：2017-07-19

Applicant: JEOL Ltd.

Inventor： Shigetoshi Oshima ,  Shigenori Tsuji

IPC: G01R33/34 ,  H01L39/24 ,  H01L39/12

CPC classification number: G01R33/34007 ,  G01R33/34023 ,  G01R33/34061 ,  H01L39/125 ,  H01L39/249

Abstract: A manufacturing method includes forming a superconductive thin-film layer on a substrate and processing the superconductive thin-film layer into a shape of a detection coil for magnetic resonance measurement. Accordingly, a superconductive thin-film layer having the detection coil shape can be formed. The method further includes irradiating the shape-processed superconductive thin-film layer with ions. Accordingly, lattice defects serving as pinning can be formed in the superconductive thin-film layer.

公开(公告)号：US10571533B2

公开(公告)日：2020-02-25

申请号：US15654049

申请日：2017-07-19

Applicant: JEOL Ltd.

Inventor： Shigetoshi Oshima ,  Shigenori Tsuji

IPC: H01L39/24 ,  G01R33/34 ,  H01L39/12

Abstract: A manufacturing method includes forming a superconductive thin-film layer on a substrate and processing the superconductive thin-film layer into a shape of a detection coil for magnetic resonance measurement. Accordingly, a superconductive thin-film layer having the detection coil shape can be formed. The method further includes irradiating the shape-processed superconductive thin-film layer with ions. Accordingly, lattice defects serving as pinning can be formed in the superconductive thin-film layer.

公开(公告)号：US10539634B2

公开(公告)日：2020-01-21

申请号：US15654049

申请日：2017-07-19

Applicant: JEOL Ltd.

Inventor： Shigetoshi Oshima ,  Shigenori Tsuji

IPC: H01L39/24 ,  G01R33/34 ,  H01L39/12

Abstract: A manufacturing method includes forming a superconductive thin-film layer on a substrate and processing the superconductive thin-film layer into a shape of a detection coil for magnetic resonance measurement. Accordingly, a superconductive thin-film layer having the detection coil shape can be formed. The method further includes irradiating the shape-processed superconductive thin-film layer with ions. Accordingly, lattice defects serving as pinning can be formed in the superconductive thin-film layer.