Invention Grant
- Patent Title: Imaging system and manufacturing apparatus
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Application No.: US15434489Application Date: 2017-02-16
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Publication No.: US10573621B2Publication Date: 2020-02-25
- Inventor: Akio Endo , Yusuke Yoshitani , Jun Koyama , Naoto Kusumoto
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2016-034259 20160225
- Main IPC: H01L23/00
- IPC: H01L23/00 ; B23K20/02 ; B23K20/26 ; H01L27/146 ; H04N5/225 ; H04N5/378 ; H01L27/12 ; H01L29/786

Abstract:
An imaging system using ultraviolet light or a manufacturing apparatus including the imaging system is provided. An imaging system includes an imaging element and a light source, which operates the imaging element with light that is emitted from the light source and reflected or transmitted by an object. A pixel included in the imaging element includes a photoelectric conversion element and a charge holding part. The light source has a function of emitting ultraviolet light to an object. The photoelectric conversion element is irradiated with the ultraviolet light reflected or transmitted by the object. The photoelectric conversion element has a function of changing the potential of the charge holding part when irradiated with the ultraviolet light and retaining the potential when not irradiated with the ultraviolet light.
Public/Granted literature
- US20170250156A1 IMAGING SYSTEM AND MANUFACTURING APPARATUS Public/Granted day:2017-08-31
Information query
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